JEOL JSM-6360LV Scanning Electron Microscope
A fully digital Scanning Electron Microscope, capable of usable magnifications of up to 100,000 times in Secondary Imaging mode with 3.0-nm resolution for topographic imaging. Three modes of Backscattered Electron imaging also provide atomic number contrast and topographical imaging in high and low vacuum modes. Allowing a small amount of air into the chamber (Low Vacuum mode) neutralizes charges on uncoated, non-conducting materials so that gold coating is not required for plastics, ceramics, and other dielectrics. Max sample size: 4 inches dia. x 2.5 inches high.
The electron microscope uses a focused beam of high-energy electrons to generate a variety of signals from scanning the surface of a sample. These include:
- Secondary Electrons for topographical imaging,
- Backscattered Electrons for Atomic Number contrast imaging, and
- Characteristic X-rays for chemical analysis by Energy Dispersive Spectrometry
Secondary Electron Imaging
The most common form of imaging, Secondary Electron Imaging (SEI) produces a high resolution image of the surface topography of a specimen. In failure analysis, this usually provides enough information to determine the mechanism of failure of a material. The SEM provides several advantages over light microscopes including greater magnification, greater depth of field, and finer magnification control.
Backscattered Electron Imaging
Three modes of Backscattered electron imaging are available in high or low vacuum modes at 4.0 nm resolution:
- Compo (for Composition): Atomic number contrasting imaging. Lighter elements appear darker while heavier elements appear brighter.
- Topo (for Topography): Surface topography imaging similar to Secondary Electron imaging
Shadow: Combination of Compo & Topo with illumination from the side.