Energy Dispersive Spectroscopy Services

Energy Dispersive Spectroscopy, also knows as EDS or EDX, and sometimes even as EDAX is a non-destrutive way to get the elemental composition of an element. It also allows for spatial resolution down to a Micron, in other words, elemental analysis can be done in very selected areas as small as 1/2 a micron in size. With the EDS, we can identify the elemental make-up of a sample as well as the distribution and concentration of elements present.

Houston Electron Microscopy’s SEM is equipped with a state-of-the-art integrated IXRF System Energy Dispersive Spectrometer (EDS). Using the latest SDD technology and an ultrathin window, elemental data from Beryllium (Z=4) through Plutonium (Z=94) is collected at extremely high rates for elemental analysis. Additionally, built-in software allows for stoichiometric calculations of compounds present such as oxides, carbides, etc.

IXRF ENERGY DISPERSIVE X-RAY SYSTEM

• New Silicon Drift Detector (SDD) – LN2 free, Resolution: <128eV@Mn or better,
• Ultra-thin window for detection of elements from Be to Pu,
• Ultra high data acquisition rates for fast analysis and mapping

Iridium Ultra Software:

• Quantitative elemental analysis using alloy standards-based analysis within ±2% relative
• Image Segmentation for “Phase Analysis”
• Automated Particle Analysis
• Elemental and compound Mapping & Line Scans

Elemental and compound information can be viewed in several formats including elemental spectrums to identify the elements present, quantitative atomic and weight percent calculations, and x-ray mapping that combines the image with its chemical composition as shown below.

Typical EDS Spectrum

Typical EDS (or EDX) spectrum showing how characteristic X-rays correspond to different elements.

Elemental X-ray Map

Elemental X-ray map of Carbon, Iron, and Oxygen mapped onto a nodular cast iron fracture. The red spheres are nodules of graphite (carabon) in a matrix of iron (blue). Oxygen is set as yellow, so rust, FE₂O₃, appears greenish.

EDS Element Mapping

EDS Element Mapping can also be done for each individual element separately as illustrated above.

EDS Element Spectrum with SEM Image Inset

EDS Element spectrum with SEM image inset. The square labeled 1 markeds the location of EDS analysis